Material Assessment
Wafer Technology employs a comprehensive set of materials characterisation tools to ensure full conformity of product supplied. All assessment is managed according to ISO9001:2000 certified quality control systems.
Structure | |
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Surface and Flat Orientation | X-Ray Diffraction (Bede Triple Axis Diffractometer) |
Defect Density | Etching, microscopy and Zeiss Aixotron, defect recognition microscopy |
Bulk Properties | |
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Carrier concentration | Keithley Automatic Hall Test System |
Mobility | As above |
Resistivity | As above |
Purity | GDMS analysis |
Dimensional Control | |
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Flat lengths | Mitutoyo Optical Comparitor |
Diameter | As Above |
Edge Profile | As Above |
Thickness | Hoverprobe |
Flatness (TTV, TIR, Bow, Warp) | Tropel FM100 Flatmaster |
Polish Quality | |
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Texture | Nomarski microscope |
Sub-surface damage | ETOCAP |
Haze and Particulates | Tencor Surfscan 6220 Collimated Light Inspection |
Surface composition | SIMS |
'Epi-ready' performance | MOCVD and MBE |
As a member of IQE plc, Wafer Technology's characterisation portfolio also extends to the regular use of an extensive Group metrology service which is comprised of many state-of-the-art wafer assessment tools. These include advanced surface analysis by atomic force microscopy (Veeco Digital Instruments DI3100) and 3D surface profilometry (Taylor Hobson Talysurf CCI 3000). Electrical assessments are made using contactless sheet resistance (Lehighton LEI1500RS) and layer thickness determinations by infra-red microscopy (Film Expert MKS 2140). Metrology is a critical aspect of product conformity and together with our own in-house range of assessment tools enables us to deliver the highest quality of product.
Please contact us if you would like to discuss a bespoke range of further wafer characterisation options.